SPIK3000A: HiPIMS 5kW – 30kW

View More details >>

SPIK3000A pulse power controller is capable of operating with any DC power supply with floating outputs to upgrade a current averaged DC technology easily to the state-of-the-art pulse-power-control technology.

The SPIK3000A is the next evolution step in the SPIK line and provide an integrated function generator (FPPG) to generate up to 8 pulses in on-/off-time and polarity. Two SPIK3000A can be synchronized to switch parallel for higher peak current (up to 4000A peak-to-peak), synchronize mid frequency in the long off-time of an HiPIMS pulse or synchronize a pulsed bias to the HiPIMS pulse.


Features:

  • ARM Processor control
  • FPPG (Free Pulse Pattern Controller)
  • Symmetric voltage output
  • Fast arc detection and suppression less than 2 µs
  • Remote interface (Profibus / RS485)
  • 1 x Trigger input
  • 2 x Trigger output
  • Fast parallel interface (Stacking)

Applications:

  • HiPIMS
  • HiPIMS + MF
  • HiPIMS + Bias
  • Bias (unsynchronized)
  • Pulsed DC


SIPP2000USB- Single & Dual

View More details >>

SIPP2000USB-Single & Dual pulse power controller is capable of operating with any DC power supply with floating outputs to upgrade a current averaged DC technology easily to the state-of-the-art pulse-power-control technology. SIPP2000USB-Single provides the most stable pulsed voltage and current output waveforms by means of the flexible pulse control parameters to meet versatile applications.

Features:

  • Single or Dual Synchronized pulse channels
  • Intuitive software control (MCC Software)
  • Output modes: DC, UP+, UP- and BP
  • Free Pulse Pattern generator
  • Symmetric or asymmetric pulse output
  • Arc suppression less than 2 µs
  • 4 x Synchron trigger output
  • 1 or 2 x Trigger input
  • Max. 1000 V pulse output
  • Max. 500/1000 A pulse output
  • Integrated control of two DC Units

Applications:

  • HiPIMS
  • HiPIMS + MF
  • HiPIMS + Bias
  • MF
  • Bias


DC Sources: 0.5kW – 30kW

View More details >>

The compact power supplies were developed for magnetrons in production plants and laboratories. Easy and safe operation makes these power supplies very flexible for many processes. The arc-handling adjusts automatically to different process parameters, so that programming is not necessary. The units are designed for the mounting in 19″-racks.

Features:

  • Automatic Arc Handling
  • Manual operation via frontpane
  • Analog Interface (AS4)
  • Serial Interface RS232/RS485
  • Air cooled
  • ½ 19″–case, 3 HU

Applications:

  • Deposition
  • Flat Panel Displays
  • Industrial Coatings
  • Glass Coatings
  • Semiconductor Manufacturing
  • Solar Photovoltaics